Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas. 2000.
ultraviolet proximity lithography — ultravioletinė prošvaisinė litografija statusas T sritis radioelektronika atitikmenys: angl. ultraviolet proximity lithography; ultraviolet proximity printing vok. Abstandsbelichtungslithografie mit Ultraviolettstrahlen, f rus. ультрафиолетовая… … Radioelektronikos terminų žodynas
Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… … Wikipedia
Abstandsbelichtungslithografie mit Ultraviolettstrahlen — ultravioletinė prošvaisinė litografija statusas T sritis radioelektronika atitikmenys: angl. ultraviolet proximity lithography; ultraviolet proximity printing vok. Abstandsbelichtungslithografie mit Ultraviolettstrahlen, f rus. ультрафиолетовая… … Radioelektronikos terminų žodynas
lithographie à micro-écart et exposition ultraviolette — ultravioletinė prošvaisinė litografija statusas T sritis radioelektronika atitikmenys: angl. ultraviolet proximity lithography; ultraviolet proximity printing vok. Abstandsbelichtungslithografie mit Ultraviolettstrahlen, f rus. ультрафиолетовая… … Radioelektronikos terminų žodynas
ultravioletinė prošvaisinė litografija — statusas T sritis radioelektronika atitikmenys: angl. ultraviolet proximity lithography; ultraviolet proximity printing vok. Abstandsbelichtungslithografie mit Ultraviolettstrahlen, f rus. ультрафиолетовая литография с микрозазором, f pranc.… … Radioelektronikos terminų žodynas
ультрафиолетовая литография с микрозазором — ultravioletinė prošvaisinė litografija statusas T sritis radioelektronika atitikmenys: angl. ultraviolet proximity lithography; ultraviolet proximity printing vok. Abstandsbelichtungslithografie mit Ultraviolettstrahlen, f rus. ультрафиолетовая… … Radioelektronikos terminų žodynas
Nanolithography — Part of a series of articles on Nanoelectronics Single molecule electronics … Wikipedia
Next-generation lithography — (NGL) is a term used in integrated circuit manufacturing to describe the lithography technologies slated to replace photolithography. As of 2009 the most advanced form of photolithography is immersion lithography, in which water is used as an… … Wikipedia
Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of … Wikipedia
Computational lithography — (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as … Wikipedia
